A low-pressure loss flow and velocity measurement sensor that contributes to maintaining cleanliness.
In the semiconductor manufacturing industry and applications where cleanliness is required, it is important to accurately grasp the fluid flow rate and velocity within piping for stable plant operation and quality control. In particular, selecting measurement instruments is essential to prevent the contamination of fine pollutants and maintain the reliability of the manufacturing process. Our porous pitot tube, "Barflow Tube," has a lower permanent pressure loss compared to conventional throttling mechanisms, contributing to energy savings while stably detecting the average flow velocity within the piping. This supports process stabilization and quality maintenance.
【Usage Scenarios】
- Flow rate and velocity management of various fluids in semiconductor manufacturing lines
- Airflow measurement in clean rooms
- Fluid measurement in environments requiring precise process control
【Benefits of Implementation】
- Energy-saving effects due to low pressure loss
- Improved process management through stable flow detection
- Reliable data acquisition through measurement of average flow velocity within piping
- Company:ジェイエムエス
- Price:100,000 yen-500,000 yen